Тип публикации: статья из журнала
Год издания: 2023
Идентификатор DOI: 10.1134/s0040579523040255
Ключевые слова: porous structures on silicon, electrochemical anode treatment conditions, ferroelectric, pyrolytic extraction method, heterostructures on porous silicon with barium and strontium titanates, Industrial Chemistry/Chemical Engineering
Аннотация: Capacitors based on silicon materials and technologies have become widely used in high-frequency applications in the current decade. To reduce the dielectric losses of silicon capacitors in the HF and microwave ranges, the possibility of creating capacitor structures from porous silicon with oxide ferroelectrics (barium and strontiПоказать полностьюum titanates) embedded in pores has been considered. Research has been carried out on the creation of ferroelectric structures based on a porous silicon matrix with barium and strontium titanates introduced in it using electrochemical anode treatment and pyrolytic extraction. The dielectric losses of capacitor structures based on a porous silicon matrix with an embedded ferroelectric were studied experimentally, and it was shown that that the obtained capacitor structures can be used in the HF and microwave ranges.
Журнал: Theoretical Foundations of Chemical Engineering
Выпуск журнала: Т.57, №4
Номера страниц: 628-632
ISSN журнала: 00405795
Место издания: Москва
Издатель: Pleiades Publishing, Ltd. (Плеадес Паблишинг, Лтд)