Тип публикации: статья из журнала
Год издания: 2021
Идентификатор DOI: 10.1134/S1063771021060051
Ключевые слова: finite-element method, phase velocity, quality factor, surface acoustic wave, bulk acoustic wave, lamb wave, single-crystal diamond, aluminum nitride, piezoelectric layered structure
Аннотация: We have implemented a 1D and 2D simulation of excitation and propagation of Lamb waves in Al/AlN/(100)-diamond and Al-IDT/AlN/(100)-diamond piezoelectric layered structures (the last in a SAW resonator configuration), respectively. The distribution of elastic displacements in Lamb waves of different orders has been calculated, the Показать полностьюmode types have been identified, and the dispersion dependences of the phase velocities have been studied including the excitation at ultrahigh frequencies. The phase velocity values calculated using the 1D and 2D models are in good agreement with those determined experimentally. We have shown that, above a synchronism frequency of an IDT, resonances which occur in these structures, are determined by excitation of Lamb waves in a substrate. The quality factor of these resonances is extremely higher than that on surface acoustic waves. This is confirmed by the experimental data. The amplitude-frequency responses and frequency dependences of the quality factor calculated using the 2D model are in good agreement with the experiment. Abstract: We have implemented a 1D and 2D simulation of excitation and propagation of Lamb waves in Al/AlN/(100)-diamond and Al-IDT/AlN/(100)-diamond piezoelectric layered structures (the last in a SAW resonator configuration), respectively. The distribution of elastic displacements in Lamb waves of different orders has been calculated, the mode types have been identified, and the dispersion dependences of the phase velocities have been studied including the excitation at ultrahigh frequencies. The phase velocity values calculated using the 1D and 2D models are in good agreement with those determined experimentally. We have shown that, above a synchronism frequency of an IDT, resonances which occur in these structures, are determined by excitation of Lamb waves in a substrate. The quality factor of these resonances is extremely higher than that on surface acoustic waves. This is confirmed by the experimental data. The amplitude-frequency responses and frequency dependences of the quality factor calculated using the 2D model are in good agreement with the experiment. © 2021, Pleiades Publishing, Ltd.
Журнал: ACOUSTICAL PHYSICS
Выпуск журнала: Vol. 67, Is. 6
Номера страниц: 590-596
ISSN журнала: 10637710
Место издания: NEW YORK
Издатель: PLEIADES PUBLISHING INC