Тип публикации: статья из журнала
Год издания: 2020
Идентификатор DOI: 10.1134/S0040579520050218
Ключевые слова: electrochemical processing, extraction-pyrolytic method, ferroelectric, heterostructures on porous silicon with barium strontium titanate, porous structures on silicon
Аннотация: Abstract: The possibility of creating capacitor structures based on porous silicon with oxide ferroelectrics embedded in the pores—barium strontium titanates, which have a diffuse phase transition—is considered. In this case, thin films of barium strontium titanate are characterized as nanostructures with ferroelectric properties. Показать полностьюTo obtain such structures, the extraction-pyrolytic method is used. The dependences of the capacitance and permittivity of the structures on the ratio of barium and strontium components in barium strontium titanates are studied. The results of this work confirm the possibility of using the presented technologies—the production of porous silicon matrices and the extraction-pyrolytic method for producing a ferroelectric based on barium and strontium titanates—to create a capacitive-type structures with different dielectric characteristics due to the possibility of varying the obtained ferroelectric composition, dimension, and morphology of the porous silicon matrix. © 2020, Pleiades Publishing, Ltd.
Журнал: Theoretical Foundations of Chemical Engineering
Выпуск журнала: Vol. 54, Is. 5
Номера страниц: 1014-1019
ISSN журнала: 00405795
Издатель: Pleiades journals