Тип публикации: статья из журнала (материалы конференций, опубликованные в журналах)
Конференция: Institute-of-Physics Electron-Microscopy-and-Analysis-Group Conference; UNIV BIRMINGHAM, BIRMINGHAM, ENGLAND; UNIV BIRMINGHAM, BIRMINGHAM, ENGLAND
Год издания: 1995
Аннотация: The artefact structures remnant within electron transparent semiconductor foils arising from ion beam milling procedures are illustrated and recipes for their inhibition or removal given. Although iodine reactive ion sputtering is effective for the removal of argon ion induced extrinsic dislocation loops from the surfaces of low stПоказать полностьюacking fault energy II-VI compounds and indium surface particles from (In,Ga)(As,P)-based compounds, iodine is found to be retained within weakly bonded semiconductors.
Журнал: ELECTRON MICROSCOPY AND ANALYSIS 1995
Выпуск журнала: Vol. 147
Номера страниц: 393-396
ISSN журнала: 09513248
Место издания: BRISTOL
Издатель: IOP PUBLISHING LTD