Тип публикации: статья из журнала
Год издания: 2015
Идентификатор DOI: 10.1134/S106377101503015X
Ключевые слова: microwaves, multifrequency acoustic resonator, synthetic diamond, aluminum nitride, bulk acoustic wave, piezoelectric layered structure, form factor, Q factor, microwave attenuation, Acoustic resonators, Aluminum, Diamonds, Microwave acoustics, Microwave devices, Mobile telecommunication systems, Nitrides, Piezoelectricity, Q factor measurement, Single crystals, Synthetic diamonds, Bulk acoustic waves, Form factors, Layered Structures, Multifrequency acoustics, Q-factors, Microwave resonators
Аннотация: The Me1/AlN/Me2/(100) diamond structure has been theoretically analyzed and experimentally investigated in the range 0.5-10 GHz using high-overtone bulk acoustic resonators with different electrodes topologies based on the Al/AlN/Mo/(100) diamond structure. The maximum quality parameter Q x f a parts per thousand 10(14) Hz was obtaПоказать полностьюined at f = 9.5 GHz. The layered structure has been analyzed using the developed HBAR software v. 2.3. It is demonstrated that the features in the frequency dependences of the parameters of such resonators are related to the behavior of a loaded thin-film piezoelectric transducer. The calculation results are in good agreement with the experiment. The frequency dependences of the equivalent parameters of the resonators have been calculated. It is shown that the synthetic type IIa diamond single crystal in combination with aluminum nitride is promising for implementation of high-Q acoustoelectronic microwave devices.
Журнал: ACOUSTICAL PHYSICS
Выпуск журнала: Vol. 61, Is. 4
Номера страниц: 422-433
ISSN журнала: 10637710
Место издания: NEW YORK
Издатель: MAIK NAUKA/INTERPERIODICA/SPRINGER