Fused Silica Container Material with Al2O3 Nanofiber Additions for Semiconductor Technologies

Описание

Тип публикации: статья из журнала

Год издания: 2024

Идентификатор DOI: 10.1134/S0020168524701085

Ключевые слова: fused silica, Container material, alumina nanofiber, mechanical strength

Аннотация: We have studied the effect of Al2O3 nanofiber on the properties of fused silica ceramics such as are used to produce containers for molten semiconductor materials. The addition of 0.05 to 0.15 wt % alumina nanofiber has been shown to cause an increase in the mechanical strength of ceramics prepared via slip casting. The addition of 0.15 wt % nanofiber increased the compressive strength of the ceramic material obtained at a sintering temperature of 1200°C from 90 ± 4 to 143 ± 9 MPa and its bending strength from 28 ± 2 to 42 ± 3 MPa.

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Издание

Журнал: Inorganic Materials

Выпуск журнала: Т. 60, 7

Номера страниц: 915-919

ISSN журнала: 00201685

Место издания: Moscow

Издатель: Pleiades Publishing, Ltd.

Персоны

  • Podshibyakina E. Yu. (Siberian Federal University)
  • Shimanskii A. F. (Siberian Federal University)
  • Vasil'Eva M. N. (Siberian Federal University)
  • Simunin M. M. (Siberian Federal University)
  • Eromasov R. G. (Siberian Federal University)
  • Bermeshev T. V. (Siberian Federal University)

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