Тип публикации: статья из журнала
Год издания: 2022
Идентификатор DOI: 10.3390/met12020319
Ключевые слова: coatings, high-entropy alloys, nitride-based, thin films
Аннотация: Surface coatings can enhance the substrate material’s properties and increase its lifetime. HEA-based materials have been extensively investigated as coating materials due to their superior hardness, excellent oxidation and corrosion resistance, effective diffusion barrier properties and wear resistance. Magnetron sputtering has beПоказать полностьюen regarded as one of the most efficient methods for the deposition of HEA-based thin films. Metallic-and nitride-based HEA coatings can be easily deposited by introducing N2 gas along with the Ar in the reaction chamber. The parameters such as target composition, bias voltage, sputtering power and notably, gas flow ratio, influence the thin film’s morphology and mechanical properties. © 2022 by the authors. Licensee MDPI, Basel, Switzerland.
Журнал: Metals
Выпуск журнала: Vol. 12, Is. 2
Номера страниц: 319
ISSN журнала: 20754701
Издатель: MDPI