Тип публикации: статья из журнала
Год издания: 2017
Идентификатор DOI: 10.1134/S0020441217050086
Аннотация: This paper presents the results of modernizing an ultrahigh-vacuum multifunctional apparatus that allows one to obtain semiconductor or metallic nanostructures in a single technological cycle and to investigate their optical and magneto-optical properties in a temperature range of 85–900 K. The capabilities of the developed system Показать полностьюwere demonstrated based on the example of studying the temperature dependence of the bulk Si permittivity via spectral ellipsometric measurements. © 2017, Pleiades Publishing, Inc.
Журнал: Instruments and Experimental Techniques
Выпуск журнала: Vol. 60, Is. 5
Номера страниц: 759-763
ISSN журнала: 00204412
Издатель: Maik Nauka Publishing / Springer SBM