Тип публикации: статья из журнала
Год издания: 2018
Идентификатор DOI: 10.1134/S1063783418070302
Аннотация: The results of structural and magnetic investigations of nanogranular Co-Al2O3 films formed from Co3O4/Al thin-film layered structures upon vacuum annealing are reported. The Co3O4/Al films have been obtained by sequential reactive magnetron sputtering of a metallic cobalt target in a medium consisting of the Ar + O-2 gas mixture aПоказать полностьюnd magnetron sputtering of an aluminum target in the pure argon atmosphere. It is shown that such a technique makes it possible to obtain nanogranular Co-Al2O3 single- and multilayer thin films with a well-controlled size of magnetic grains and their distribution over the film thickness.
Журнал: PHYSICS OF THE SOLID STATE
Выпуск журнала: Vol. 60, Is. 7
Номера страниц: 1425-1431
ISSN журнала: 10637834
Место издания: MOSCOW
Издатель: PLEIADES PUBLISHING INC