Growth Simulation and Structure Analysis of Obliquely Deposited Thin Films


Тип публикации: статья из журнала

Год издания: 2016

Идентификатор DOI: 10.1007/s11182-016-0771-2

Ключевые слова: oblique angle deposition, simulation of film growth, Monte Carlo method

Аннотация: Based on the Monte Carlo method, a model of growth of thin films prepared by oblique angle deposition of particles is constructed. The morphology of structures synthesized by simulation is analyzed. To study the character of distribution of microstructural elements (columns) in the film plane, the autocorrelation function of the miПоказать полностьюcrostructure and the fast Fourier transform are used. It is shown that with increasing angle of particle incidence, the film density monotonically decreases; in this case, anisotropy arises and monotonically increases in the cross sections of columns, and the anisotropy of distribution of columns in the substrate plane also increases.

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Выпуск журнала: Vol. 59, Is. 2

Номера страниц: 301-307

ISSN журнала: 10648887

Место издания: NEW YORK

Издатель: SPRINGER


  • Belyaev B.A. (Siberian State Aerospace University Named after Academician M. F. Reshetnev)
  • Izotov A.V. (Siberian Federal University)
  • Solovev P.N. (L. V. Kirensky Institute of Physics of the Siberian Branch of the Russian Academy of Sciences)

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