1. Главная
  2. Публикации
  3. Structural, Optical, and Thermoelectric Properties of the ZnO:Al Films Synthesized by Atomic Layer Deposition

Structural, Optical, and Thermoelectric Properties of the ZnO:Al Films Synthesized by Atomic Layer Deposition

Описание

Тип публикации: статья из журнала

Год издания: 2019

Идентификатор DOI: 10.1134/S1063783419100354

Ключевые слова: aluminum-doped zinc oxide, atomic layer deposition, structural and optical properties, thermoelectric properties, thin films

Аннотация: Abstract: Aluminum-doped zinc oxide thin films have been grown by atomic layer deposition at a temperature of 200°C. Using X-ray diffraction, it has been established that the ZnO:Al thin films exhibits the reflections from the (100), (002), (110), and (20

Ссылки на полный текст

Издание

Журнал: Physics of the Solid State

Выпуск журнала: Vol. 61, Is. 10

Номера страниц: 1904-1909

ISSN журнала: 10637834

Издатель: Pleiades Publishing

Персоны

  • Tambasov I.A. (Russian Acad Sci, Krasnoyarsk Sci Ctr, Kirensky Inst Phys, Siberian Branch, Krasnoyarsk 660036, Russia)
  • Volochaev M.N. (Russian Acad Sci, Krasnoyarsk Sci Ctr, Kirensky Inst Phys, Siberian Branch, Krasnoyarsk 660036, Russia)
  • Voronin A.S. (Russian Acad Sci, Krasnoyarsk Sci Ctr, Siberian Branch, Krasnoyarsk 660036, Russia)
  • Evsevskaya N.P. (Russian Acad Sci, Krasnoyarsk Sci Ctr, Kirensky Inst Phys, Siberian Branch, Krasnoyarsk 660036, Russia; Russian Acad Sci, Krasnoyarsk Sci Ctr, Inst Chem & Chem Technol, Siberian Branch, Krasnoyarsk 660036, Russia)
  • Masyugin A.N. (Siberian State Univ Sci & Technol, Krasnoyarsk 660014, Russia)
  • Aleksandrovskii A.S. (Russian Acad Sci, Krasnoyarsk Sci Ctr, Kirensky Inst Phys, Siberian Branch, Krasnoyarsk 660036, Russia; Siberian Fed Univ, Krasnoyarsk 660041, RussiaArticle)
  • Smolyarova T.E. (Russian Acad Sci, Krasnoyarsk Sci Ctr, Siberian Branch, Krasnoyarsk 660036, Russia; Siberian Fed Univ, Krasnoyarsk 660041, RussiaArticle)
  • Nemtsev I.V (Russian Acad Sci, Krasnoyarsk Sci Ctr, Kirensky Inst Phys, Siberian Branch, Krasnoyarsk 660036, Russia)
  • Lyashchenko S.A. (Russian Acad Sci, Krasnoyarsk Sci Ctr, Kirensky Inst Phys, Siberian Branch, Krasnoyarsk 660036, Russia)
  • Bondarenko G.N. (Russian Acad Sci, Krasnoyarsk Sci Ctr, Inst Chem & Chem Technol, Siberian Branch, Krasnoyarsk 660036, Russia)
  • Tambasova E.V (Siberian State Univ Sci & Technol, Krasnoyarsk 660014, Russia)

Вхождение в базы данных