Тип публикации: статья из журнала

Год издания: 2020

Идентификатор DOI: 10.33180/InfMIDEM2020.303

Ключевые слова: acoustic waves, finite element method, microelectromechanical systems (mems), piezoelectric films, microwave resonators

Аннотация: This paper considers issues of modeling ultra-high frequency MEMS resonators based on acoustic Lamb waves. In addition, the analysis of factors that determine whether it is possible to increase resonators working frequency and electromechanical coupling factor is carried out. Influence of resonator excitation scheme and acoustic waПоказать полностьюveguide thickness for a range of piezoelectric materials (i.e. AlN, ZnO, GaN) on phase velocity for acoustic Lamb wave zero modes is investigated. As a result we've got estimations determining dependence of resonators electromechanical coupling coefficient on their geometry.

Журнал: INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS

Выпуск журнала: Vol. 50, Is. 3

Номера страниц: 179-187

ISSN журнала: 03529045

Место издания: LJUBLJJANA

Издатель: SOC MICROELECTRONICS, ELECTRON COMPONENTS MATERIALS-MIDEM

• Marinushkin Pavel S. (Siberian Fed Univ, Sch Engn Phys & Radio Elect, Krasnoyarsk, Russia)
• Levitsky Alexey A. (Siberian Fed Univ, Sch Engn Phys & Radio Elect, Krasnoyarsk, Russia)
• Zograf Fyodor G. (Siberian Fed Univ, Sch Engn Phys & Radio Elect, Krasnoyarsk, Russia)
• Bakhtina Valentina A. (Siberian Fed Univ, Sch Engn Phys & Radio Elect, Krasnoyarsk, Russia)

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