In situ magneto-optical ellipsometry data analysis for films growth control

Описание

Тип публикации: статья из журнала

Год издания: 2017

Идентификатор DOI: 10.1016/j.jmmm.2016.12.050

Ключевые слова: Ellipsometry, In situ measurements, Magneto-optical Kerr effect, Critical currents, Ellipsometry, Ferromagnetic materials, Dielectric tensors, Ferromagnetic films, Growth control, In-situ measurement, Magneto-optical ellipsometries, Magneto-optical Kerr effects, Real-time growth, Semi-infinite medium, Optical Kerr effect

Аннотация: In this work we present the way of ferromagnetic films study by means of magneto-ellipsometry. The method of interpretation of in situ magneto-optical ellipsometry spectra for real time growth control is described. The method has been successfully tested on . Si/SiO2/Fe films within the model of a homogeneous semi-infinite medium. Показать полностьюAs a result, the dielectric tensor components for Fe layer were calculated using a developed approach. © 2016 Elsevier B.V.

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Издание

Журнал: JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS

Выпуск журнала: Vol. 440

Номера страниц: 196-198

ISSN журнала: 03048853

Место издания: AMSTERDAM

Издатель: ELSEVIER SCIENCE BV

Авторы

  • Maximova O.A. (Fed Res Ctr KSC SB RAS, Kirensky Inst Phys, Krasnoyarsk 660036, Russia; Reshetnev Siberian State Aerosp Univ, Krasnoyarsk 660037, Russia; Siberian Fed Univ, Krasnoyarsk 660041, Russia)
  • Kosyrev N.N. (Fed Res Ctr KSC SB RAS, Kirensky Inst Phys, Krasnoyarsk 660036, Russia; Krasnoyarsk State Agrarian Univ, Achinsk Branch, Achinsk 662150, Russia)
  • Varnakov S.N. (Fed Res Ctr KSC SB RAS, Kirensky Inst Phys, Krasnoyarsk 660036, Russia; Reshetnev Siberian State Aerosp Univ, Krasnoyarsk 660037, Russia)
  • Lyaschenko S.A. (Fed Res Ctr KSC SB RAS, Kirensky Inst Phys, Krasnoyarsk 660036, Russia; Reshetnev Siberian State Aerosp Univ, Krasnoyarsk 660037, Russia)
  • Yakovlev I.A. (Fed Res Ctr KSC SB RAS, Kirensky Inst Phys, Krasnoyarsk 660036, Russia; Reshetnev Siberian State Aerosp Univ, Krasnoyarsk 660037, Russia)
  • Tarasov I.A. (Fed Res Ctr KSC SB RAS, Kirensky Inst Phys, Krasnoyarsk 660036, Russia; Reshetnev Siberian State Aerosp Univ, Krasnoyarsk 660037, Russia)
  • Shevtsov D.V. (Fed Res Ctr KSC SB RAS, Kirensky Inst Phys, Krasnoyarsk 660036, Russia; Reshetnev Siberian State Aerosp Univ, Krasnoyarsk 660037, Russia)
  • Maximova O.M. (Siberian Fed Univ, Krasnoyarsk 660041, Russia)
  • Ovchinnikov S.G. (Fed Res Ctr KSC SB RAS, Kirensky Inst Phys, Krasnoyarsk 660036, Russia; Reshetnev Siberian State Aerosp Univ, Krasnoyarsk 660037, Russia; Siberian Fed Univ, Krasnoyarsk 660041, Russia)

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